Data-driven Control Strategy for a Reticle Stage in a Lithographic Tool
نویسندگان
چکیده
where p is the controller parameter, J is the gradient, k is the iteration number, R is a positive definite matrix and γ is the step size. In this paper, a data-driven control strategy is proposed to synthetically build the control system of a 6-DOF ultra-precision dual-stroke stage. The stage, namely reticle stage which is a critical lithographic component, moves the pattern in synchronization with the wafer.
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تاریخ انتشار 2014